微小激光曝光区域温度分布均匀化整形方法  

Temperature uniformity of the laser exposed area

作　　者：王华明[1] 叶玉堂[1] 吴云峰[1] 刘霖[1] 方亮[1] 刘学智[1] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《光电工程》2006年第4期55-58,共4页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(60277008);教育部重点项目(03147);四川省科技厅资助项目(04GG021-020-01)

摘　　要：提出了实现光束曝光区温度分布均匀化的方法。该方法主要是充分利用二元光学法和液晶空间光调制的各自优点,并按照设计系统的要求,最大程度避免二元光学法使用不灵活而液晶空间光调制激光能量利用率不高的缺点,实现温度分布均匀化系统优化。为研究该方法的可行性,首先通过遗传算法设计一个16台阶的二元光学整形器件;针对二元光学只能应用于特定条件下的缺点,再引入液晶空间光调制方法,该方法可以对入射光束进行实时、可调控的整形,实现对曝光区温度分布进行实时控制。理论分析和仿真结果都表明,两种方法按照实际需要进行选择,可以有效地实现光束曝光区温度分布均匀化。A temperature uniformity method for the laser exposed area is presented. This method makes the best of the advantage of binary optics and liquid crystal-spatial light modulator. It can avoid the unhandy of binary optics and the low efficiency of liquid crystal-spatial light modulator according to the demand. It optimizes temperature uniformity system. For researching the feasibility of this method, a binary optics with 16 gray levels has been designed by using Genetic algorithm. Considering the binary optics can only work in special condition, another method using Liquid Crystal-Spatial Light Modulator is presented. It＇s a real-time and controllable method and it can ream-time control the temperature distribution of the exposed area. Theoretical analysis and simulation results indicate that if the proper method is selected according to practical demands, temperature uniformity of the exposed area can be realized effectively.

关 键 词：温度均匀化 二元光学元件 液晶空间光调制器 

分 类 号：TN256[电子电信—物理电子学]