离子交换制作0.85μm MMI光功分器的仿真研究  

Simulation on 0.85μm MMI Optical Power Splitter by Ion Exchange

作　　者：袁菁[1] 罗风光[1] 曹明翠[1] 

机构地区：[1]华中科技大学激光技术国家重点实验室,湖北武汉430074

出　　处：《半导体光电》2006年第2期133-135,160,共4页Semiconductor Optoelectronics

摘　　要：提出了利用离子交换技术制作多模干涉(MMI)型光功分器的设计方法。以1×8MMI光功分器为例,采用导模传输分析法分析了器件基本原理,对离子交换制作波导的折射率分布进行了讨论。针对工作波长为0.85μm的1×8 MMI光功分器结构参数进行了设计,对器件输出特性、各项技术指标、离子交换决定的折射率差Δn对器件性能的影响均进行了BPM仿真,结果表明:利用离子交换方法制作MMI型光功分器,设计指标可达到均匀性约0.009 dB、平均插入损耗约9.111 dB和最大插入损耗约9.116 dB,均优于现有器件的指标。The method to fabricate an optical power splitter with multi-mode interference （MMI） is proposed using ion exchange technology. As 1 × 8 MMI optical power splitter,the basic theory is explained by means of guided-model propagation analysis. The refractive index profile of the waveguide fabricated by ion exchange is studied. The structure parameters of 1 × 8 MMI optical power splitter at 0. 85 μm are designed, and the output performance, all technical parameters and the influence of refractive index differences on the performances of the device are simulated by beam propagation method （BPM）. The results show that the uniformity of the designed MMI optical power splitter is 0. 009 dB,the average insertion loss is 9. 111 dB,and the maximum insertion loss is 9. 116 dB, the performances of the designed splitter are better than commercial ones.

关 键 词：导波光学 光功分器 多模干涉 离子交换 

分 类 号：TN256[电子电信—物理电子学]