A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors  

作　　者：李明 王鸣 戎华 李洪谱 

机构地区：[1]Key Laboratory of Opto-Electronic Technology, School of Physical Science and Technology, Naniing Normal University, Nanjing 210097 [2]Department of Electrical and Electronics Engineering, Shizuoka University, Hamamatsu, 432-8501, Japan

出　　处：《Chinese Physics Letters》2006年第5期1211-1214,共4页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant No 50375074, and the Jiangsu Provincial High- Novel Technology Project under Grant No BG2003024.

摘　　要：An optical microelectromechanical-system （MEMS） pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel analytical approach and the traditional transfer matrix method. The analytical expressions of the deflection of multi-layer diaphragm and absolute optical reflectance are derived respectively. The influence of residual stress on the deflection of diaphragm is also analysed. Simulation results given by the finite element method are consistent with the ones which are analysed by using the analytical approach. The analytical approach will be helpful to design and fabricate the optical MEMS pressure sensors with multi-layer diaphragm based on Fabry-Perot interferometry.An optical microelectromechanical-system （MEMS） pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel analytical approach and the traditional transfer matrix method. The analytical expressions of the deflection of multi-layer diaphragm and absolute optical reflectance are derived respectively. The influence of residual stress on the deflection of diaphragm is also analysed. Simulation results given by the finite element method are consistent with the ones which are analysed by using the analytical approach. The analytical approach will be helpful to design and fabricate the optical MEMS pressure sensors with multi-layer diaphragm based on Fabry-Perot interferometry.

关 键 词：FABRY-PEROT CAVITY 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]