基于SAW表面气液相效应和GC分离柱的气敏传感器  

Surface Acoustic Wave Gas Sensors Integrated GC Separation Column Based on Gas-Liquid Phase Transition

作　　者：郭希山[1] 童基均[2] 陈裕泉[2] 王立人[1] 

机构地区：[1]浙江大学生物系统工程与食品科学学院,杭州310027 [2]浙江大学生物医学工程系,生物传感器国家专业实验室,杭州310027

出　　处：《传感技术学报》2006年第2期318-322,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然基金项目资助(30470461)

摘　　要：限于传统涂敷敏感膜的声表面波(SAW)气敏传感器存在成膜困难和选择性差、重复性差以及再生性差等问题,本研究提出一种基于压电基底表面气体气液相转换效应机理的瑞利波传感器。在此基础上开发了一种基于瑞利声表面波传感器和气相色谱(GC)分离柱的便携式气体检测系统。最后实验论证了方案的可行性,初步的实验结果表明该系统具有分析时间短、选择性好、灵敏度高,可检测ppb(10-9)浓度的混合VOCs以及成本低等优势,显示其在痕量挥发性有机气体检测和分析应用上有良好的潜力和前景。Due to the problems of selectivity, repeatability and reproducibility, as well the difficulty of sensitive film coating, polymer coated surface acoustic wave （SAW） sensors have limits for the application of gas detection. A novel Rayleigh SAW sensor based on gas-liquid phase transition on the surface of piezoelectric crystal substrate was developed to improve the limits of the current methods for trace gas detection. The sensitivity of this Rayleigh wave sensor could be increased up to a 1,000 fold compared with the polymer coated SAW sensor. A portable prototype instrument based on this Rayleigh wave sensor integrated with capillary column for selective separation was designed and developed for fast gas detection and analysis. Experiments were conducted to test the feasibility of the scheme. The preliminary experimental result shows this system has good selectivity, high sensitivity, good repeatability and reproducibility, and low cost. It can detect and quantify the mixed VOCs at ppb（10^-9） level concentrations in several minutes, which demonstrate the potential and prospect for the application of trace VOCs gas detection.

关 键 词：声表面波传感器 气液相转换 毛细管分离柱 VOCs 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]