几种氮化物薄膜与熔融玻璃之间的高温界面摩擦行为  

The Hogh Temperature Interfacial Friction Behavior Between Nitride Films and Molten Glass

作　　者：庄业[1] 邵天敏[1] 王慧[1] 张晨辉[1] 路新春[1] 高学宁[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《中国表面工程》2006年第2期25-29,35,共6页China Surface Engineering

基　　金：国家自然科学基金(50475012)资助项目

摘　　要：使用多弧离子镀设备制备了AlTiN,CrN,TiN,ZrN薄膜,在850℃条件下,利用自行研制的高温界面摩擦试验装置对上述薄膜与熔融玻璃之间的界面摩擦行为进行了试验研究。利用X射线衍射分析了上述4种薄膜在高温试验前后的物相结构变化。此外,在500℃条件下测量了4种材料与熔融玻璃的高温润湿行为。试验结果表明CrN,TiN,ZrN3种薄膜材料具有良好的抗高温氧化性能,而AlTiN薄膜在高温下会逐渐氧化生成Al2TiO5氧化膜,该氧化膜能够阻止氧化反应的继续进行,且AlTiN,CrN,TiN,ZrN4种薄膜与熔融玻璃之间的接触角与界面摩擦存在对应关系。AlTiN, CrN, TiN and ZrN films were prepared using a multi-arc plating equipment. The interfacial friction behavior between the prepared films and molten glass was experimentally studied at 850 ℃ using a self-made high temperature interracial friction testing device. X-ray diffraction was used to analyze the change of microscopic physical structure of the four films before and after the experiments. In addition, Measurements were carried out at 500 ℃ to determine the high-temperature wetting behavior between molten glass and the four materials. The results indicate that CrN, TiN, ZrN thin films have good oxidation resistance at elevated temperature, while AlTiN film will oxidize gradually under elevated temperature and form a Al2TiO5 film, which will prevent the oxidation reaction going further. It was also observed that a correspondence exists between the contact angles and interfacial frictions, for each combination of the four material and molten glass.

关 键 词：界面摩擦 高温 熔融玻璃 氮化物薄膜 接触角 

分 类 号：O485.6[理学—固体物理]