静电悬浮系统的数字控制与实验研究  

Design and experimental study of DSP-based digital control for an electrostatic levitation system

作　　者：李冬梅[1] 李晓春[1] 韩丰田[1] 王永梁[1] 

机构地区：[1]北京清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2006年第2期69-72,共4页Journal of Chinese Inertial Technology

摘　　要：介绍了一种基于DSP的数字控制器的总体结构及控制器算法的设计。在此基础上构建了三轴静电悬浮系统,并通过仿真和实验讨论了不同采样频率对系统性能的影响。实验结果表明,系统带宽达到750Hz,谐振峰小于3dB,刚度等各项性能均满足静电悬浮系统的指标要求。In this paper, the overall structure of a DSP-based Digital controller and the control algorithm are presented. Experimental investigation on the 3-axis electrostatic levitation system, which is based on this controller, reveals that the system bandwidth reaches 750 Hz whose resonant peak less than 3 dB. All the key performance specifications, including the stiffness, can well satisfy the control requirement of our electrostatic levitation system.

关 键 词：惯性仪表 静电悬浮系统 数字控制器 数字信号处理器(DSP) 

分 类 号：U666.1[交通运输工程—船舶及航道工程]