日本表面处理技术近期动向 第四部分 金属钌电镀  

Current trend of surface treatment technics in JapanPart Ⅳ—Metallic ruthenium electroplating

作　　者：嵇永康 木名濑隆 卫中领[3] 周延伶 

机构地区：[1]苏州华杰电子有限公司,江苏苏州215002 [2]日■メタルプレティング(株)高槻技術センタ [3]中国科学院上海微系统与信息技术研究所金属腐蚀与防护技术中心,上海200050 [4]ィビデン株式会社

出　　处：《电镀与涂饰》2006年第5期38-41,共4页Electroplating & Finishing

摘　　要：分别介绍了金属钌的物理特性和亚硝基氯化钌镀钌、钌酸钾镀钌、硫酸钌镀白色钌和镀黑色钌的工艺规范,氨基磺酸镀白色钌和氨基磺酸镀黑色钌的工艺规范及各种应用实例。指出了氨基磺酸的加入对镀液的稳定性及涂层性能的提高所起的作用。比较了钌、铑和钯镀层的性能,并介绍了钌镀层性能的测试方法。说明了钌电镀的工业用途。The physical characteristic of metallic ruthenium and process criterions of nitroso ruthenium chloride ruthenium electroplating, potassium ruthenate ruthenium electroplating, ruthenium sulfate white and black ruthenium electroplating, and process criterions and various application examples of sulfamic acid white and black ruthenium electroplating were introduced respectively. The action of sulfamic acid added into the solution for stability of bath and improvement of film＇s performance was presented. The deposit＇s properties of ruthenium, rhodium and palladium were compared. Testing methods for ruthenium deposit＇s properties were described. Industrial use of ruthenium electroplating was indicated.

关 键 词：镀钌 氨基磺酸 工艺规范 镀铑 镀钯 

分 类 号：TG178[金属学及工艺—金属表面处理] TQ153[金属学及工艺—金属学]