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作 者:赵培[1] 吴福全[1] 郝殿中[1] 王礽[2] 任树锋[1]
机构地区:[1]曲阜师范大学激光研究所,曲阜273165 [2]曲阜师范大学物理工程学院,曲阜273165
出 处:《光子学报》2006年第5期671-674,共4页Acta Photonica Sinica
摘 要:为了提高Glan-Taylor棱镜的透射率,改善其使用性能,研究了Glan-Taylor棱镜增透膜的设计、制备及测试·经过多次工艺实验选择了膜料并找到了合适的蒸镀条件,较好的解决了膜层与冰洲石晶体的附着力,用膜系软件进行了优化设计,并利用电子束蒸发方法实际制备了设计的膜系.最后利用岛津UV3101分光光度计测试了棱镜端面增透膜的反射光谱特性,测量结果表明镀膜以后在设计的光谱区域内端面的反射率均小于0.4%,并且膜层牢固·For increasing the transmissivity of the Glan-Taylor prism and making it's performance better, the design, evaporation and measurement of the Glan-Taylor prism's antireflection films were studied. The suitable film materials and control condition were found by engneering testing for many times and solved the problem of the adhensive power between the film and the iceland crystal. The film struetrue was designed using the film soft and the film was evaporated the film on the iceland crystal surface according to the film structrue which had been designed. The reflective spectral of the antirefleetive film were measured by spectral photometers. The result of the measurement shows that the reflectance of the end surface, which had been filmed,is less than 0.4 % in the rang of spectral regions, and the adhesive power of the film is firm.
关 键 词:薄膜光学 Olan-Taylor棱镜 增透膜 附着力
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