Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators  

作　　者：方岱宁 孙玉鑫 苏爱嘉 

机构地区：[1]Department of Engineering Mechanics, Tsinghua University, Beijing 100084 [2]Department of Mechanical Engineering, University of Hong Kong, Hong Kong

出　　处：《Chinese Physics Letters》2006年第6期1554-1557,共4页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant Nos 10025209, 10121202, and 10572069, and the Key Project of the Ministry of Education of China under Grant No 0306.

摘　　要：The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical-numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical-numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.

关 键 词：THERMOELASTIC INTERNAL-FRICTION MEDIA 

分 类 号：TN24[电子电信—物理电子学]