高频高精度石英晶体元件电参数测量技术研究  

Research on Measurement Instrument with High Frequency and Precision for Electric Parameters of Quartz Crystal Units

作　　者：刘解华[1] 张其善[1] 杨军[1] 吴鑫山[1] 

机构地区：[1]北京航空航天大学电子信息工程学院,北京100083

出　　处：《仪器仪表学报》2006年第5期447-450,共4页Chinese Journal of Scientific Instrument

摘　　要：在介绍π网络法石英晶体元件电参数测量原理的基础上，设计了一种频率高达200MHz的石英晶体元件电参数测量系统，分析了石英晶体元件和π网络的等效电路，采用自动网络分析方法计算出石英晶体元件的阻抗，并依次消除了系统误差和测量误差。实验证明，在1～200MHz频率范围内，系统对串联谐振频率测量误差在±1×10^-4以内，重复测量一致性在±0．5×10^6以内。Based on measurement theory of π network method for electric parameters of quartz crystal units,a measurement system whose frequency is up to 200MHz is designed,and the equivalent circuits of quartz crystal unit and π network are analysed. To improve measurement precision,the automatic network analysis method is used to measure the impedance of quartz crystal units,both system error and measurement error are removed in turn. It was proved that serial resonant frequency measurement repeatability of the system is less than ±0.5× 10^-6,and that measurement error is less than ±1× 10^-6 in frequency scope ranging from 1MHz to 200MHz.

关 键 词：石英晶体 π网络法 等效电路 自动网络分析 

分 类 号：TH741[机械工程—光学工程]