电容位移测量仪的校准与薄膜的磁致伸缩测量  

THE CALIBRATION OF CAPACITANCE-DISPLACEMENT MICROMETER AND THE MEASUMENT OF THE MAGNETOSTRICTION COEFFICIENT OF THIN FILMS

作　　者：姜华[1] 周白杨[1] 陈鸿彬[1] 邓光华[1] 

机构地区：[1]福州大学材料科学与工程学院,福州350002

出　　处：《理化检验（物理分册）》2006年第5期235-238,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：福建省科技厅高新技术与火炬计划项目(99-H-44);福州大学科技发展基金(XKJ(QD)-01/3);福州大学开放测试基金(2005035)

摘　　要：自制了一套电容位移测量仪的校准装置,并对DWS型电容位移测量仪进行了校准和标定,使位移测量仪在较宽的量程范围内获得的悬臂梁位移测量值的误差≤5％。通过采用经改进校准和标定的位移测量仪,利用悬臂梁-电容法测定了稀土超磁致伸缩薄膜样品的磁致伸缩系数λ,提高了测量精度。By using a self-constructed equipment, the DWS type Capacitance-displacement micrometer was calibrated accurately and the error area of Cantilever displacement is lower than 5 % in the large measuring range. The magnetostrietion coefficient of a cantilever magnetostrictive thin film was measured through Capacitance- displacement method and the results were satisfied.

关 键 词：悬臂梁-电容法 超磁致伸缩薄膜 磁致伸缩系数 

分 类 号：TM27[一般工业技术—材料科学与工程] TP212[电气工程—电工理论与新技术]