微晶硅电池的制备及提高其效率的优化  

FABRICATION OF MICROCRYSTALLINE SILICON SOLAR CELLS AND OPTIMIZATION STUDY OF THE EFFICIENCY

作　　者：张晓丹[1] 赵颖[1] 朱锋[1] 高艳涛[1] 麦耀华[1] 魏长春[1] 孙建[1] 耿新华[1] 熊绍珍[1] 

机构地区：[1]南开大学光电子薄膜器件与技术研究所,天津300071

出　　处：《太阳能学报》2006年第5期419-422,共4页Acta Energiae Solaris Sinica

基　　金：天津市科委攻关项目(043186511);国家自然科学基金项目(60506003);天津市国际科技合作项目(05YFGHHZ01400)

摘　　要：采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备了不同硅烷浓度系列的微晶硅电池。结果表明:电池的开路电压随着硅烷浓度的增大而逐渐增加,而电池的短路电流则先增加后减小,在转折点电池的效率达到最大,填充因子则变化不明显;(220)择优取向出现,I(220)/I(111)比值大,电池的短路电流密度也大,电池的效率也最高;在实验的范围内,电池的短路电流密度和厚度成正比例关系;首次在国内制备出了效率达7.3%,短路电流密度(Jsc)为21.7mA/cm2,开路电压(Voc)为0.52V,填充因子(FF)为65%的微晶硅电池。Series of microcrystalline silicon solar ceils were prepared at different silane concentrations （SC）. The results showed that open circuit voltage （ V∝ ） increased with increasing SC, however short maximum circuit current density （ Jsc ） at SC = 5.5 %, which reaches maximum conversion efficiency of solar ceils. Fill factor almost has no chang with the variation of SC. Jsc increases with increasing thickness of solar cells in the experiments. Microcrystalline silicon solar ceil with conversion efficiency 7.3% was fabricated （Jsc = 21.7mA/cm^2, V∝ = 0.52V, FF = 65% ）.

关 键 词：微晶硅电池 甚高频等离子体增强化学气相沉积 短路电流密度 

分 类 号：TK514[动力工程及工程热物理—热能工程]