纳米晶LaFeO_3薄膜的制备与不同气氛处理后的光电子能谱  

Preparation of Nanocrystalline LaFeO_3 Film and XPS Studies on Nanocrystalline LaFeO_3 Films Treated in Different Atmospheres

作　　者：索辉[1] 赵毅[1] 胡广达[1] 阮圣平[1] 吴志发[1] 徐宝琨[1] 

机构地区：[1]吉林大学电子科学与工程学院,长春130012

出　　处：《吉林大学学报（理学版）》2006年第3期465-468,共4页Journal of Jilin University:Science Edition

摘　　要：利用sol-gel工艺,在硅衬底上制备了纳米晶LaFeO3薄膜.测试了在乙醇蒸气和NO2气氛下处理后的光电子能谱(XPS),结果表明,纳米晶LaFeO3薄膜吸附乙醇后,表面吸附氧含量明显降低,铁含量略有下降;吸附氧化性气体NO2后,表面吸附氧和铁含量明显增高,且存在三价铁离子向四价铁离子转化的趋势.通过测试和分析表明,LaFeO3的敏感机理不仅与表面吸附氧相关,还与表面三价铁离子的变价有关.Nanocrystalline LaFeO3 films were synthesized via the sol-gel technique on silicon substrate. XPS spectra were taken after the nanocrystalline LaFeO3 films were treated in ethanol and nitrogen dioxide gases respectively. XPS analysis showed that when ethanol was adsorbed by LaFeO3 film, the surface adsorption of oxygen obviously decreased, Fe content decreased a little bit as well; on the other hand, when NO2 was adsorbed on its surface, the surface adsorbed oxygen increased apparently and Fe content increased as well; in the mean time, the transition trend from Fe^3＋ to Fe^4＋ was found. All the observations above show that the mechanism of the gas sensitivity of nanocrystalline LaFeO3 films is closely related with the surface adsorption of oxygen and the changeable valance of iron.

关 键 词：薄膜 纳米晶材料 光电子能谱 

分 类 号：O484.5[理学—固体物理]