多孔阳极氧化铝膜的最佳制备工艺研究  

Study on Optimal Technique for Fabricating Porous Anodic Aluminum Oxide Membrane

作　　者：李淑英[1] 宋琛[1] 

机构地区：[1]大连理工大学化工学院,辽宁大连116012

出　　处：《表面技术》2006年第3期33-35,共3页Surface Technology

摘　　要：为了得出多孔阳极氧化铝膜的最佳制备工艺,利用正交试验法研究了制备多孔阳极氧化铝膜的影响因素:氧化时间、氧化电压和扩孔时间,分别讨论了各影响因素对阳极氧化铝膜的单独作用;通过扫描电镜(SEM)、X射线衍射仪等观测了阳极氧化铝膜的形貌和结构特征,结果表明:氧化膜上的微孔分布均匀,孔径大小基本相同,平均孔径约为150nm,孔密度约为2.5×109个/cm2;得出阳极氧化最佳制备工艺:温度20℃,反应时间120m in,反应电压115V,扩孔时间6m in。The effective factors such as the oxidizing time, the oxidizing voltage and bore-enlarging time by orthogonal test method are studied and then each effective factor on fabricating porous anodic aluminum oxide membrane is respectively discussed. Otherwise, anodic aluminum oxide membrane is characterized by scanning electron microscope （SEM）, X-ray diffraction（XRD） and so on. The result shows that oxide template has several unique structure properties such as symmetrical bores, almost same size diameter（ about 150nm）, high bore density （2.5 × 10^9 per square cm）. The optimal technique is confirmed that the temperature is 20℃, the oxidizing time is 120min, the oxidizing voltage is 115V and the bore-enlarging time is 6min.

关 键 词：阳极氧化铝 制备 扩孔 工艺参数 氧化膜 

分 类 号：TG174.451[金属学及工艺—金属表面处理]