一种谐振式微加速度计的设计  

A Novel Design of Resonance Type Accelerometer

作　　者：郑晓虎[1] 

机构地区：[1]淮阴工学院机械系

出　　处：《压电与声光》2006年第3期294-296,共3页Piezoelectrics & Acoustooptics

基　　金：国防基础研究重点基金资助项目(J1500E002)

摘　　要：提出一种基于谐振原理、电容检测的微型加速度计。通过外加加速度使质量块经杠杆将力放大施加到谐振器上,改变谐振梁上的轴向应力,从而改变谐振梁的振动频率。研究表明这种加速度计的测量范围达66 g。同时采用有限元法进行了仿真模拟,结果显示传感器灵敏度约18 Hz/g,工作模态固有频率为625.981 kHz。A new type of micro-accelerometer based on resonance principle with comb capacitance measure was discussed in this paper. The force applied on the resonator was amplified through the lever. The variable force altered the axis-stress and the vibrating frequency of the resonator. It was proved that the maximum measured acceleration was 66 g. The vibrate property was analyzed with ANSYS software. The simulate results displayed that the sensitivity of micro-accelerometer was about 18 Hz/g and the inherent frequency of the operating mode was 625. 981 kHz.

关 键 词：微型电子机械系统(MEMS) 谐振 加速度计 仿真模拟 

分 类 号：TH824.4[机械工程—仪器科学与技术]