自确认压力传感器结构设计  

Structure Design of Self-Validating Pressure Sensor

作　　者：冯志刚[1] 王祁[1] 信太克规[1] 

机构地区：[1]哈尔滨工业大学自动化测试与控制系,哈尔滨150001

出　　处：《传感技术学报》2006年第3期662-666,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助'自确认压力传感器的研究'(60572010)

摘　　要：自确认传感器能够实现传感器故障的自诊断和自恢复,除了提供被测量的确认的测量值之外,还提供测量值的不确定度、测量值的状态等表征传感器输出可信度的参数,可以实时了解传感器的工作状态,及时采取相应的措施,大大提高监测系统的可靠性。本文针对自确认圆平膜片应变式压力传感器的设计,分析了圆平膜片的应力和应变分布,建立了圆平膜片上两种传统布片方式的数学模型,在分析圆平膜片压力传感器故障模式的基础上,对传统的布片方式进行了改进,建立了在圆平膜片上进行多组布片的方案,为实现自确认圆平膜片应变式压力传感器提供了坚实的基础。Self-validating （SEVA） sensor has the ability of self-diagnostics and self-reconstruction, it provides not only the validated measurement value, but also the validated uncertainty and measurement value status, which represent the credibility of sensor＇s output. By using self-validating sensor, we can get the work condition of the sensor and take proper action in real time. This paper describes the structure design of self-validating circular-flat diaphragm strain gauge pressure sensor. The mathematical model of two traditional displacement of strain gauge on the circular-flat diaphragm was established by analyzing the stress and strain distribution of the circular-flat diaphragm, based on this and the fault mode analysis of the strain gauge pressure sensor, the traditional displacement was improved and a multi-displacement of strain gauges on the circular-flat diaphragm was established, which provides a stable basis for the implementation of self-validating circular-flat dianhragm strain gauge nressure sensor.

关 键 词：自确认传感器 圆平膜片 应力分布 布片方式 故障模式 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]