Optical properties and structures of silver thin films deposited by magnetron sputtering with different thicknesses  

作　　者：孙喜莲 洪瑞金 侯海虹 范正修 邵建达 

机构地区：[1]Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2006年第6期366-369,共4页中国光学快报（英文版）

摘　　要：A series of thin Ag films with different thicknesses grown under identical conditions are analyzed by means of spectrophotometer. From these measurements the values of refractive index and extinction coefficient are calculated. The films are deposited onto BK7 glass substrates by direct current （DC） magnetron sputtering. It is found that the optical properties of the Ag films can be affected by films thickness. Below critical thickness of 17 nm, which is the thickness at which Ag films form continuous films, the optical properties and constants vary significantly with thickness increasing and then tend to a stable value up to about 40 nm. At the same time, X-ray diffraction measurement is carried out to examine the microstructure evolution of Ag films as a function of films thickness. The relation between optical properties and microstructure is discussed.A series of thin Ag films with different thicknesses grown under identical conditions are analyzed by means of spectrophotometer. From these measurements the values of refractive index and extinction coefficient are calculated. The films are deposited onto BK7 glass substrates by direct current （DC） magnetron sputtering. It is found that the optical properties of the Ag films can be affected by films thickness. Below critical thickness of 17 nm, which is the thickness at which Ag films form continuous films, the optical properties and constants vary significantly with thickness increasing and then tend to a stable value up to about 40 nm. At the same time, X-ray diffraction measurement is carried out to examine the microstructure evolution of Ag films as a function of films thickness. The relation between optical properties and microstructure is discussed.

关 键 词：CALCULATIONS Film growth Magnetron sputtering Optical properties Refractive index Silver SPECTROPHOTOMETERS SUBSTRATES X ray diffraction analysis 

分 类 号：O484.41[理学—固体物理]