用于平面光波导的控温模块的设计与制作  

Design and Fabrication of a Temperature Control Module for Planaar Lightwave Guides

作　　者：吴黎[1] 韩培德[1] 窦金峰[1] 叶志成[1] 全宇军[1] 陆晓东[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083

出　　处：《光电子．激光》2006年第6期654-657,共4页Journal of Optoelectronics·Laser

基　　金：国家"863"计划资助项目(2001AA312130);国家自然科学基金资助项目(60477020)

摘　　要：研制了一种用于平面光波导（PLC）的控温模块。该模块采用比例微分积分（PID）控制回路控温，针对PLC控温特点，采用了优化模块的导热与散热，调整控温电路中的PID参数并采用H桥电流输出等方案对整个控温模块进行了优化设计。该模块体积小，长宽高分别为7cm×6cm×4cm；控温面积为3cm×3cm，适用于大尺寸的PLC芯片；控温范围广，从0～70℃；控温速率快、精度高，能将温度稳定到土0．15℃内。A temperature control module for planar I ightwave circuit （PLC） is introduced. The module is based on the PID-control circuitry. The optimization of the whole module especially for PLC application is given. The optimization schemes include heat induction and heat dissipation of the module, the adjustment of the PID parameters and the adoption of the H-bridge output circuits. The module is compact with 7 cm × 6 cm× 4 cm. The temperature control scale of the module is large with 3 cm × 3 cm. The temperature control range of the module is wide （from 0 to 70 ℃ ）. The temperature control velocity of the module is fast and the temperature control module is precise with fluctuation within ±0.15℃.

关 键 词：控温模块 负温度系数 电热制冷片(TEC) 平面光波导(PLC) 

分 类 号：TN252[电子电信—物理电子学]