移相器微位移旋转误差的分析及测试  

Analysis and Test on Rotation Error Induced by the Micro-displacement of Phase-shifter

作　　者：武旭华[1] 陈磊[1] 颜加军[1] 

机构地区：[1]南京理工大学电光学院,江苏南京210094

出　　处：《光子学报》2006年第6期919-923,共5页Acta Photonica Sinica

基　　金：国防军工计量"十五"重点项目资助(60803134)

摘　　要：以压电陶瓷(PZT)微位移器为主要研究对象,引入一种处理静态干涉图的新方法——虚光栅移相叠栅条纹法,设计实验对一台实际使用的移相器微位移旋转误差进行测试研究,对其引起的波面旋转情况进行了定量的计算分析,并给出测试结果·用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时,不需要使用任何移相器件,可以进行动态位相的检测,整个移相过程用计算机进行控制,避免了引入额外的移相误差·Based on the theory of linear polynomial fitting algorithm, the micro-displacement error of phase shifter which can induce the rotation of fringes in the processing of phase shift is analyzed. A novel method for static interferogram analysis, named the virtual grating phase-shifting moire fringe method that is based on virtual grating technology, phase-shifting interferometry and moire technology, is introduced and analyzed. When the static interferogram with a certain spatial frequency in the experiment is processed by this method, the phase shift is introduced mathematically and controlled by the computer to avoid any phase-shifting error, so the dynamic phase could he evaluated. Some valuable experiments are carried out and the results are presented to show the feasibility of this error-analysis method. In terms of error analysis, the criterions to control the error are presented.

关 键 词：移相干涉术 虚光栅叠栅条纹法 PZT移相器 

分 类 号：TH744.3[机械工程—光学工程]