新型厚膜陶瓷电容式压力传感器感压元件研究  

Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor

作　　者：唐力强[1] 李民强[1] 陈建群[1] 张宾[1] 王英先 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室,安徽合肥230031

出　　处：《传感器与微系统》2006年第6期39-42,共4页Transducer and Microsystem Technologies

基　　金：安徽省"十五"科技攻关计划资助项目(040120503)

摘　　要：采用厚膜传感技术研制新型陶瓷电容式压力传感器,重点开展厚膜陶瓷电容感压元件的制备工艺和混合集成化研究。详细阐述了双电容感压元件的工作原理、结构设计、工艺制备方法及性能测试。试验结果表明:研制的感压元件性能良好,非线性误差低于1.0%,迟滞误差小于0.5%,测试电容和参考电容温度系数近乎一致。Novel ceramic capacitive pressure sensors （CCPS） are researched by the thick film sensitive technology. The preparation technique and hybrid integration of the pressure sensitive component are emphasized. The basic principle, fabric design, manufacturing technique and performance test of dual-capacity pressure sensitive component are described in detail. Experimental results indicate that the component has excellent performance, the non-linearity error and hysteresis error are within 1.0 % and 0. 5 % respectively, especially, both temperature coefficient of capacity （TCC） are identical.

关 键 词：厚膜 电容式压力传感器 感压元件 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]