用有限元法计算飞秒激光双光子成型点弹性模量  

Calculating the Elastic Modulus of Single Voxels by Finite Element Analysis

作　　者：苏亚辉[1] 郭锐[1] 董磊[2] 陈宇航[1] 肖诗洲[1] 黄文浩[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230026 [2]中国科学技术大学纳米结构与物理研究室,合肥230022

出　　处：《纳米技术与精密工程》2006年第2期107-110,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50275140;50335050)

摘　　要：采用有限元法对材料为SCR500的飞秒激光双光子成型点力学性能进行建模及仿真计算,得出了不同弹性模量下成型点与探针之间的作用力．进而利用原子力显微镜接触模式,选用无针尖探针,测量了成型点的力学性能,得出了相同位移载荷下成型点与探针之间的作用力．将测量结果和仿真结果进行比较,推算出成型点的弹性模量．分析结果表明,双光子固化成型点的弹性模量大约为宏观材料弹性模量的1／7．这为进一步研究双光子飞秒激光加工微器件的力学性能提供了基础．The single voxels mechanic property of material SCR500 is modeled and simulated by finite element analysis （FEA）. The cantilever-voxels interaction force of variety elastic modulus is achieved. By measuring the mechanic property of single voxels with contact model of atomic force microscopy （AFM） and tipples cantilever, the cantilever-voxels interaction force in the same displacement is acquired. By comparing the measurement result with the simulation, the elastic modulus of single voxels is calculated. The result indicates that the elastic modulus of single voxels is about 1/7 of elastic modulus of macro sample,which provides basic theory to improve the mechanical properties analysis of micro-devices made by two photon femtosecond laser fabrication.

关 键 词：有限元 飞秒激光双光子成型点 弹性模量 

分 类 号：TN249[电子电信—物理电子学]