飞秒激光双光子微细并行加工方法  

Parallel Processing for Femto-Laser Microfabrication

作　　者：曹伟丽[1] 肖诗洲[1] 郭锐[1] 程光华[2] 黄文浩[1] 

机构地区：[1]中国科学技术大学精密机械和精密仪器系SPM实验室,合肥230027 [2]中国科学院西安光机所瞬态光学国家重点实验室,西安710068

出　　处：《纳米技术与精密工程》2006年第2期115-117,共3页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50335050)

摘　　要：飞秒激光三维微细加工技术具有真三维的制作能力和亚微米的加工分辨率等特点,因此获得越来越多的关注,但其串行工艺加工效率低是其技术难点．为了提高加工效率,搭建了一套飞秒激光并行加工平台,利用微透镜阵列实现飞秒激光分束聚焦,初步实现了双光子微细并行加工,在光敏树脂和玻璃上分别并行加工出多个二维结构,加工单点分辨率达到1．25μm．针对实验结果,对实验的加工一致性和分辨率进行分析,提出了进一步提高加工效率和加工一致性的方法．More and more attention is paid to femto-laser microfabrication due to its unique technological fea- tures, such as fabrication ability of true 3D microstructures and sub-micron resolution. But low efficiency is the disadvantage of this technology. To increase the efficiency, a system for parallel fabrication was built up using a microlen array to produce multiple spots, and the parallel femto-laser fabrication was preliminarily realized. Two-dimensional multiple structures were manufactured, such as micro letters demonstrated as examples of mass production, from the photopolymerizable resin and glass, and the single point resolution is 1.25 μm. The coherence and resolution are analysed according to the results of the experiment, and the method to increase the coherence and resolution is brought forward.

关 键 词：飞秒激光 多焦点聚焦 并行加工 

分 类 号：TN249[电子电信—物理电子学]