红外焦平面杜瓦排气残余气体分析实验研究  

Experimental Study on Residual Gas Analysis of Exhausting from Infrared FPA Dewar

作　　者：葛树萍[1] 朱颖峰[1] 

机构地区：[1]昆明物理研究所

出　　处：《红外技术》2006年第5期293-298,共6页Infrared Technology

摘　　要：实验研究用四极质谱仪对金属杜瓦排气进行长期动态监测,跟踪内部主要气体成分的分压强的大小变化,得出排气工艺对杜瓦内表面放气量大小的影响,介绍了实验的原理、装置、方法、数据和干扰因素,对影响杜瓦真空度的主要气体成分进行了初步研究,提出改进杜瓦排气工艺的可能方向,对工艺处理具有实际意义。In this experiment, the quantity change of partial pressure of main elements is given by longtime dynamic measuring of metal Dewar exhausting with Quadrupole Mass Spectrometer（QMS）, the results show that exhausting technology influences outgassing of Dewar vacuum vessel, this paper gives the theory, equipment, method, data and disturb fators, we also give primary investigation how the main gases affect the vacuum integrity of dewar and point out the possible ways which can be applied to present technology.

关 键 词：杜瓦 排气 残气成分 

分 类 号：TN215[电子电信—物理电子学]