误差扩散法编码设计制作微光学元件  

Fabrication of micro optical elements with coding gray-tone mask designed by error-diffusion method

作　　者：刘倩[1] 张怡霄[1] 郭永康[1] 刘波[1] 温圣林[1] 唐雄贵[1] 

机构地区：[1]四川大学物理学院

出　　处：《光电工程》2006年第6期106-110,共5页Opto-Electronic Engineering

基　　金：国家自然科学基金-中物院联合基金资助项目(10376019)

摘　　要：以发展微光学元件制作新方法为目标,提出利用误差扩散编码方法设计灰阶编码掩模制作微光学元件。此方法同其他编码方法相比,具有量化效果好、衍射效率高、制作文件小、计算速度快、通用性好等优点。用此方法对制作微透镜的掩模进行了设计,利用预校正法和边缘增强法相结合的方法对掩模进行了优化,并对曝光、显影过程进行了模拟,得到了满意的结果。With the aim of developing fabrication methods of micro-optics, encoding gray-tone mask by error-diffusion method for fabrication of micro-optics elements is proposed. Compared with the other encoding methods, error-diffusion method has many metrics, such as fast computation, good quantization quality, high diffraction efficiency, and small fabrication size and so on. Suggested by this, a new error-diffusion coding method is presented to design the coding gray-tone mask in order to avoid the disadvantage that is designed by Lohmann＇s encoding method. And a satisfying simulation result is obtained with the designed coding gray-tone mask.

关 键 词：微光学 灰阶编码掩模 误差扩散法 边缘增强法 微透镜 

分 类 号：O438[机械工程—光学工程] TN256[理学—光学]