用辉光放电质谱法和火花源质谱法分析表征金属和半导体  

Analysis and Characterization of Metals and Semiconductors by GDMS and SSMS

作　　者：刘成德 

机构地区：[1]国家环境分析测试中心

出　　处：《质谱学报》1996年第3期6-17,共12页Journal of Chinese Mass Spectrometry Society

摘　　要：辉光放电质谱（ＧＤＭＳ）和火花源质谱（ＳＳＭＳ）是进行高纯固体材料直接和全面分析的两种主要的分析技术，ＧＤＭＳ和ＳＳＭＳ各有所长，有互补性。适当运用这两种技术，综合其优势，可望在固体样品分析表征的许多应用中获得更全面的信息和更可靠的分析结果。本文介绍了ＧＤＭＳ在贵金属分析领域中的两个应用，讨论了高纯镓分析中的表面富集问题，介绍了用ＳＳＭＳ研究杂质元素分布均匀性和相关性的方法。Glow Discharge Mass Spectrometry(GDMS) and Spark Source Mass Spectrometry (SSMS)are the main analytical techniques allowing the direct and complete quantitative analysis of high purity solid materials. GDMS and SSMS with their strengths and limitations are complementary rather than mutually exclusive in a variety of applications in the analysis and characterization of solid materials. More information and better analytical results are achievable by adequate usage of both techniques. In this paper, two, applications of GDMS in precious metal analysis are presented. Analysis of high purity gallium is discussed with emphasis on surface segregation. Investigation of the distribution of trace elements with SSMS is described.

关 键 词：辉光放电质谱 火花源质谱 金属 半导体 质谱法 

分 类 号：O657.6[理学—分析化学] TG115.337[理学—化学]