SiC悬浊液超光滑表面加工技术  

Technique of super smooth surface processing by SiC suspension liquid

作　　者：赵继[1] 陈德祥[1] 张富[1] 詹建明[1] 张恩忠[1] 

机构地区：[1]吉林大学机械科学与工程学院,长春130022

出　　处：《吉林大学学报（工学版）》2006年第4期518-522,共5页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家自然科学基金资助项目(50175049)

摘　　要：以纳米SiC颗粒悬浊液作为超光滑加工的载体,研制了适合进行超光滑表面加工且具有良好分散性和稳定性的纳米SiC颗粒悬浊液,阐述了悬浊液浮超光滑表面加工的机理,并用该悬浊液对K9光学玻璃进行了加工试验研究,并进行了AFM测试。验证结果表明,加工获得的K9光学玻璃表面粗糙度可以达到Ra=0.84 nm的水平。Taking the nanometer SiC particle as the carrier of the suspension liquid for the super smooth surface processing, the nanometer SiC suspension liquid with good dispersibility and stability was developed. The mechanism of processing by the suspension liquid was explained. The developed suspension liquid was tested to process the optical glass K9. The results showed that the surface roughness of the processed optical glass tested by AFM reaches Ra = 0.84 nm.

关 键 词：机床 超光滑表面加工 悬浊液 加工机理 

分 类 号：TG663[金属学及工艺—金属切削加工及机床]