带整体开启阀的双腔串联压电薄膜泵  

Piezoelectric membrane pump with series-connected double chambers and holistic opening valve

作　　者：孙晓锋[1] 李欣欣[1] 杨志刚[1] 刘九龙[1] 程光明[1] 

机构地区：[1]吉林大学机械科学与工程学院

出　　处：《吉林大学学报（工学版）》2006年第4期529-533,共5页Journal of Jilin University:Engineering and Technology Edition

基　　金：'863'国家高技术研究发展计划项目(2002AA431250)

摘　　要：阐述了带整体开启阀的双腔串联压电薄膜泵的工作原理并给出结构设计。对整体开启阀的过流特性进行了理论推导,定性分析了影响其过流性能的因素,并用实验加以证明。对影响压电泵性能的因素,如腔体高度、阀的结构、阀的滞后性、空穴现象等进行了理论分析与实验测试,得出了其对压电泵输出性能的影响规律。所设计带整体开启阀的双腔串联压电薄膜泵样机具有自吸性,通过调整输入电压和频率可控制泵的流量与压力输出,工作性能稳定。在输入电压为200 V、工作频率为250 Hz左右时,最大输出流量和压力可分别达到950 mL/m in和75 kPa,自吸高度为0.285 m。The working principle of the piezoelectric membrane pump with the series-connected double chambers and the holistic opening valve was analyzed theoretically and its structure design was given. The flow characteristics of the hoistic opening valve were derived and their affecting factors were analyzed qualitatively and confrimed by experiments. The factors affecting the output performance of the pump, such as the chamber height, the structure of values, the hysteresis of valves, cavitation, etc., were discussed and tested experimentally, and their effects were explicated. The developed piezoelectric membrance pump with the double chambers and the hoistic opening valve is characterized by self-suction capability and performance steadiness, its flow and pressure outputs may be controlled by its power supply voltage and fuquency. When it is powered by AC200 V/250 Hz, its maximum flow output is 950 mL/min, maximam pressure is 75 kPa, self- suction height is 0. 285 m.

关 键 词：流体传动与控制 薄膜泵 压电振子 自吸 

分 类 号：TH38[机械工程—机械制造及自动化]