常压介质阻挡放电等离子体发射光谱的检测分析  

Spectroscopic Investigation of Atmospheric Pressure Dielectric Barrier Discharge Plasma

作　　者：唐晓亮[1] 邱高[1] 王良[1] 冯贤平 

机构地区：[1]东华大学物理系,上海200051 [2]波多黎各大学物理系,波多黎各009313343

出　　处：《光散射学报》2006年第2期156-160,共5页The Journal of Light Scattering

基　　金：上海市教委"曙光计划"项目(02SG28);教育部科学技术研究重点项目(03077)

摘　　要：以常压介质阻挡放电等离子体作为研究对象,在常温常压条件下使用介质阻挡放电光谱诊断装置,得到N2第二正系跃迁和Ar原子发射谱线。通过对放电光谱的检测分析,可以察知常压介质阻挡放电等离子体的特性,并可运用同一元素谱线的相对强度来诊断电子激发温度等物理参量,以达到对材料表面改性过程的实时监控,工作的结果对常压介质阻挡放电及其在材料改性的应用中具有重要的意义。Dielectric barrier discharge （DBD） plasma at atmospheric pressure has become higher and higher with its ever - increasing applications to surface modification of materials. For controlling the process of materials＇ surface modification promptly, the spectral lines of nitrogen and argon plasma emission were recorded and analyzed by using spectral diagnosis equipment of dielectric barrier discharge plasma at atmospheric pressure. The experimental results indicate that spectral diagnosis has been proved a workable method, and it is great importance to the diagnosis of dielectric barrier discharge at atmospheric pressure.

关 键 词：介质阻挡放电 常压 低温等离子体 发光光谱 等离子体诊断 

分 类 号：O461[理学—电子物理学] TM832[理学—物理]