压阻式加速度传感器动态特性及相关因素的分析  

Analysis of the Dynamic Characteristics and Related Elements of the Piezo-resistance Type Acceleration Transducer

作　　者：于泉[1] 范茂军 吴亚林 孙慧明[1] 

机构地区：[1]黑龙江大学信息与电子科学系,东北传感技术研究所

出　　处：《黑龙江大学自然科学学报》1996年第1期74-80,共7页Journal of Natural Science of Heilongjiang University

摘　　要：本文针对压阻式加速度计的特点，采用了数、力分析方法，引入传递函数的概念，建立了压阻式加速度计动态特性的基本模型。结合实际对传感器的幅频和相频特性进行了必要的分析，并以三维加速度计为例，说明了结构参数对传感器性能的影响。This paper is directed with the features of the piezoresistive accelerometer, uses the mathematics and force analysis methords, introduces the concept of the transfer function,estiblishes the basis model of the piezo-resistance type acceleration transducer. Combined with the facis, the authors finish the analyses of the features of the amplitude-frequency and the phase-frequency, give an example for a three-dimensional acceleration transducer, state the effecs of the structure parameters on the properties of the transducer.

关 键 词：压阻 加速度计 动态特性 传感器 

分 类 号：TH824.4[机械工程—仪器科学与技术]