A novel hybrid surface micromachined segmented mirror for large aperture laser applications  

作　　者：李捷 陈海清 余洪斌 

机构地区：[1]Department of Opto-Electronics Engineering Huazhong University of Science and Technology

出　　处：《Chinese Optics Letters》2006年第7期422-424,共3页中国光学快报（英文版）

基　　金：This work was supported by the National Natural Science Foundation of China under Grant No. 10476010.

摘　　要：A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 μm, while the rotation angles around x and y axes are±2.3° and ±1.45°, respectively.A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 μm, while the rotation angles around x and y axes are±2.3° and ±1.45°, respectively.

关 键 词：ABERRATIONS ELECTRODES Laser applications ROTATION SURFACES 

分 类 号：TN249[电子电信—物理电子学]