CO_2激光雕刻机的折/衍混杂f-θ镜设计  

Design of hybrid refractive-diffractive f-θ lens working on CO_2 laser drilling system

作　　者：吴环宝[1] 王肇圻[1] 傅汝廉[1] 刘娟[1] 乐丹 

机构地区：[1]南开大学现代光学研究所光电信息技术科学教育部重点实验室,天津300071 [2]粤铭激光技术有限公司,广东东莞523048

出　　处：《红外与激光工程》2006年第3期351-353,358,共4页Infrared and Laser Engineering

基　　金：国家自然科学基金资助项目(60277021)

摘　　要：以工作于CO2激光主波长的传统两片球面透镜型f-θ镜为基础,引入衍射面实现消色差,设计了工作于可调谐CO2激光的波段范围9.0￣11.0μm的f-θ镜。结果表明,所设计的折/衍混杂f-θ镜不仅很好地工作在所要求的波段范围内,而且单色像差比原单波长f-θ镜有所提高,像面上的光斑在各个波长和视场上大小均匀。系统像差在各个波长上都接近或达到衍射极限,具有精确的光学扫描特性。Based on a conventional 2-element f-θ lens working on the primary wavelength of CO2 laser, an achromatic f-θ lens working on tunable CO2 laser 9.0-11.0 μm was designed by adding a diffractive surface to one of the two lenses. It was shown that the designed hybrid refractive-diffractive f-θ lens could work perfectly on the required wavelength range. The monochromatic aberrations increased as compared with the conventional f-θ lens, and the spot size for each wavelength and each field of view on the image surface was uniform. The aberrations of the system on each wavelength were near, or reached the diffraction limit, and the f-θ lens could work in a scanning system with perfect accuracy.

关 键 词：光学设计 f-θ镜 折/衍混杂 消色差 

分 类 号：TH74[机械工程—光学工程]