金属铜纳米孔洞阵列膜制备方法研究  

Metal nano-hole array copied from AAO template

作　　者：赵信峰[1] 方炎[1] 

机构地区：[1]北京市纳米光电子学重点实验室,首都师范大学物理系,北京100037

出　　处：《物理学报》2006年第7期3785-3788,共4页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:20275024);北京市自然科学基金(批准号:2982010)资助的课题.~~

摘　　要：以多孔阳极氧化铝膜(anodicaluminumoxide,AAO)为模板,用真空蒸镀法复制了金属铜的纳米孔洞阵列膜,SEM结果表明,制备得到的金属铜纳米孔洞阵列膜形貌与AAO膜一致.此方法简单易行,能大规模生产,为纳米膜的工业化复制提供了一种新的工艺,为纳米线、纳米管等纳米阵列材料的合成与组装提供了有利的条件.Well-aligned and highly ordered nano-hole array copper membranes were copied from anodic aluminum oxide （AAO） template by vacuum plating. SEM shows that the nanoholes of copper membranes are hexagonally arranged with high regularity consistent with that of AAO template. The mean diameter of the holes was dependent on the corresponding parameter of AAO template. Compared with AAO membranes, the nano-hole array metal ones have many advantages in better chemical and thermal stability and higher mechanical strength, and are likely to play an important role in nano-copy field.

关 键 词：AAO模板 真空蒸镀 金属铜纳米孔洞阵列膜 纳米复制 

分 类 号：O484.1[理学—固体物理]