纳米结构TiB_2涂层的制备及性能  

Properties and Preparation of the Nano-structure TiB_2 Coating

作　　者：孙荣幸[1] 张同俊[1] 戴伟[1] 李松[1] 

机构地区：[1]华中科技大学模具技术国家重点实验室,湖北武汉430074

出　　处：《金属热处理》2006年第7期40-42,共3页Heat Treatment of Metals

基　　金：东莞市科研发展专项基金(2003D1011)

摘　　要：利用射频磁控溅射技术在冷作模具钢片上沉积了TiB2涂层。分别采用场发射扫描电子显微镜和小掠射角X射线衍射方法研究了涂层横截面的形貌和晶体结构,并对涂层的纳米硬度和摩擦性能进行了表征。结果表明,TiB2涂层的厚度均匀,结构致密,沿(001)晶向择优生长,具有纳米晶结构,硬度显著提高,耐磨性能好。TiB2 coatings were prepared by radio-frequency magnetron sputtering technique on the substrates of cold-working steel. The cross-section morphology and microstructure of the coatings were studied by field emission scanning electron microscopy and glancing angle X-ray diffraction respectively, and the nano-hardness and friction behavior of the coatings were also characterized. The results show that the TiB2 coatings have a uniform dense nano-structure with a preferential crystalline orientation of [ 001 ], and the hardness is considerably improved with good wear resistance.

关 键 词：射频磁控溅射 TIB2涂层 摩擦性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]