基于厚膜技术的双电容陶瓷压力传感器  

Dual-capacity Ceramic Pressure Sensor Based on Thick Film Technology

作　　者：唐力强[1] 李民强[1] 陈建群[1] 李鹏[1] 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室,安徽合肥230031

出　　处：《仪表技术与传感器》2006年第7期3-5,共3页Instrument Technique and Sensor

基　　金：安徽省"十五"科技攻关计划(040120503)

摘　　要：基于厚膜传感技术研制出双电容陶瓷压力传感器,设计了一种具有高检测灵敏度的信号处理电路,详细阐述了双电容传感器感压元件的工作原理、结构设计、工艺制备方法及性能测试。实验结果表明:研制的传感器线性误差小于0.37%,迟滞误差小于0.3%,电容温度系数低于97×10-6/℃.A dual-capacity ceramic pressure sensor was researched based on the thick film sensor technology. At the same time, a high pricise signal processing circuit was designed, the basic principle,fabric design,manufacturing technique and performance test of dual-capacity pressure-sensitive component were described in detail. Experimental results indicate that the sensor has many merits such as： the non-linearity error and hysteresis error are within 0.37% and 0.3% ,the temperature coefficient of eapaeity（TCC） is under 97 10^-6/℃.

关 键 词：厚膜技术 双电容 压力传感器 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]