聚酰亚胺上催化剂增强化学气相沉积钯-铂双层膜(英文)  

Catalyst-Enhanced Chemical Vapor Deposition of Palladium-Platinum Bilayer Films on Polyimide

作　　者：郑建华[1] 周锦兰[2] 俞开潮[2] 葛学贵[1] 于澍燕[3] 

机构地区：[1]中国地质大学材料科学与化学工程学院,湖北武汉430074 [2]华中科技大学化学系,湖北武汉430074 [3]中国科学院化学研究所高分子物理与化学国家重点实验室,北京100080

出　　处：《催化学报》2006年第6期465-467,共3页

基　　金：Supported by the National Natural Science Foundation of China (40172018 ,20275011)

摘　　要：以N2和O2为载气,采用催化剂增强化学气相沉积法于聚酰亚胺上获得了Pt和Pd-Pt双层金属薄膜.当使用Pd(hfac)2和Pt Me2(COD)为前驱体,在同一反应器内共沉积时,只有Pt被沉积.金属Pd和Pt顺序沉积可形成Pd-Pt双层膜.Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N2 and O2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films.

关 键 词：催化剂增强化学气相沉积 聚酰亚胺 铂膜 钯-铂双层膜 

分 类 号：O643.32[理学—物理化学]