储存初期多孔硅膜龟裂现象的显微观测与分析  

OBSERVATION AND ANALYSIS OF THE CRACK PHENOMENON OF POROUS SILICON LAYER DURING STORAGE IN AIR

作　　者：李刚[1] 万歆[1] 钟以诚[1] 朱永强[1] 戴道宣[1] 

机构地区：[1]复旦大学物理系

出　　处：《物理学报》1996年第11期1925-1929,共5页Acta Physica Sinica

摘　　要：用显微镜观察到多孔硅薄膜在空气中储存初期的龟裂现象，揭示了发光畴区周围裂缝的来源。The crack phenomenon of porous silicon during storage in air has been observed by using interference microscope. The origin of the crack is inferred and the cause of crack phenomenon is discussed briefly.

关 键 词：多孔硅 薄膜 龟裂 显微观测 

分 类 号：O484.1[理学—固体物理] TN204[理学—物理]