光学元件损伤在线检测中的图像处理  

Image processing in online inspection of damage in optics

作　　者：解亚平[1] 孙志红[2] 成泽[1] 陈波[2] 景峰[2] 

机构地区：[1]华中科技大学物理系,武汉430074 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2006年第7期1085-1089,共5页High Power Laser and Particle Beams

基　　金：国家863计划项目资助课题

摘　　要：利用在传统的边缘提取方法上加入灰度抑制,并在梯度计算中考虑每个像素与周围8个邻域的关系的图像处理方法,解决了在线检测中被检测元件以布儒斯特角放置、元件片数较多、CCD所采集的损伤图像噪声成分复杂等造成的像质较差的图像处理问题,并系统地进行了光学元件疵点分析和计算。分析计算结果表明:此图像处理方法得到的损伤疵点尺寸与实际尺寸相符,误差在检测的范围内;为大型光学系统中光学元件损伤的在线、自动化检测提供了一种有用的技术途径。A kind of image processing method is introduced, which is based on the classical method about edge detection. Gray restrain is brought in, and the relations between the grid and its eight neighbours are considered in calculating the gradient. There are several optics which are laid with Browster angle and the image collected by CCD includes many noises, so the components of the image are quite complex and the quality is bad. The advanced method has been proved that it is possible to get over the problem and get information about the size of damage accurately. In addition, systemic analysis and calculation of optic damages are presented. The result shows that the damage size calculated in advance accords with the real size ,and the error is in the scope of permission. The image processing method can provide a useful approach for online inspection and automatization inspection of damage in optics.

关 键 词：图像处理 光学元件损伤 边缘提取 在线检测 

分 类 号：TN911.73[电子电信—通信与信息系统]