用虚光栅移相莫尔条纹法测量光学元件的角度偏差  

Application of Virtual Grating Phase-shifting Moiré Fringe Method to Angle Departure Evaluation of Optical Components

作　　者：武旭华[1] 陈磊[1] 孙娇芬[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《计量学报》2006年第3期221-223,共3页Acta Metrologica Sinica

摘　　要：引入一种处理静态干涉图的新方法———虚光栅移相莫尔条纹法,详细介绍了此方法的原理。它是一种基于虚光栅技术、移相技术和莫尔技术的载频图像处理方法,用这种方法处理一幅加有载频的干涉图时,可以实现干涉条纹移相的效果,且没有移相误差。以玻璃立方体楔角为例,介绍了虚光栅移相莫尔条纹法在光学元件的角度偏差测试方面的应用,给出了实验结果,并与ZYGO的测试结果进行比对,结果吻合,从而证实了这种方法的可行性。测量精度可达到0.1″,因此可应用于对角规精度的标定。A novel method for static intederogram analysis, named the virtual grating phase-shifting moiré fringe method that is based on virtual grating technology, phase-shifting intederometry and moiré technology, is introduced and analyzed. When the static interferogram with a certain spatial frequency is processed by this method, the effects of phase shifting can be attained without any phase shifting error. Furthermore, the dynamic phase could be evaluated because the requirement for environment stability is not strict. Some valuable experiments about this method to measure the angle deviation of a optical cube are carried out and the results are presented. The feasibility of the virtual grating phase-shifting moiré fringe method is achieved by comparing these results with those of ZYGO＇ s.

关 键 词：计量学 移相莫尔条纹 虚光栅 角度偏差 干涉图 图像处理 

分 类 号：TB922[一般工业技术—计量学]