光声光谱法探测微量气体  

Photoacoustic Spectroscopy Method for Trace Gas Detecting

作　　者：王建业[1] 纪新明[1] 吴飞蝶[1] 周嘉[1] 黄宜平[1] 

机构地区：[1]复旦大学微电子系ASIC和系统国家重点实验室,上海200433

出　　处：《传感技术学报》2006年第4期1206-1211,共6页Chinese Journal of Sensors and Actuators

摘　　要：介绍光声光谱气体传感器的发展及应用意义,根据气体光声效应讨论了光声气体传感器的工作原理,详细分析了多种不同结构传感器的原理及优缺点。重点讨论了常用一维管状光声腔体的光声理论,并给出了数学模拟模型。根据国内外的研究现状,分析了光声气体探测系统的重难点以及可能的解决方法,并讨论了光声传感向MEMS方向发展的原因及意义。The development and applications of photoacoustic spectroscopy gas sensors is present. The theory of the photoacoustic gas sensors and the advantages of different photoacoustic sensors are discussed. This work focuses on the one-dimension PA cell and has given the model simulation of it. Based on recent instances, the important and difficult points in the research of photoacoustic sensors are given out and some possible methods to improve them are discussed. And the conclusion is that the MEMS photoacoustic sensors have many advantages and will be the future studying trending.

关 键 词：光声光谱法 光声腔 气体探测 微机械技术 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]