具有一定取向的TiO_2薄膜的研究与制备  

Preparation and study of oriented TiO_2 thin film

作　　者：张长沙[1] 赵高凌[1] 杨耀东[1] 韩高荣[1] 

机构地区：[1]浙江大学材料系硅材料国家重点实验室,浙江杭州310027

出　　处：《功能材料》2006年第8期1283-1285,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50372060);国家高技术研究发展计划(863计划)资助项目(2004AA32G040)

摘　　要：用浸渍法将P25粉末涂敷于溶胶-凝胶法制备的TiO2预制膜上,进行一系列的热处理,制备TiO2薄膜样品。用X射线衍射法对样品进行晶体结构分析,发现用这种方法可以得到具有一定取向的TiO2薄膜。其结晶程度和取向度与浸渍时间和热处理时间相关,在浸渍时间为10h、热处理温度为500℃时,得到沿(101)面方向取向生长的TiO2薄膜。TiO2 thin film was prepared by dipping the sol-gel-derived prefabricated film in the TiO2 aqueous suspension and annealing. Crystalline behavior of the samples was investigated by X-ray diffraetion（XRD）. The results showed some of the samples were （101） preferentially oriented. Crystalline behavior and orientation of the samples were dependent on dipping time and annealing temperature. TiO2 thin film which has （101） orientation was obtained when the dipping time and annealing temperature was 10h and 500℃, respectively.

关 键 词：二氧化钛 取向 浸渍 薄膜 

分 类 号：TB321[一般工业技术—材料科学与工程] TG146.4[金属学及工艺—金属材料]