等离子体高压电源的研究  

Study of the Plasma High-voltage Power Supply

作　　者：陈实[1] 张才清[1] 李网生[1] 徐功潜[1] 

机构地区：[1]南京电子技术研究所,江苏南京210013

出　　处：《电力电子技术》2006年第4期96-98,共3页Power Electronics

摘　　要：针对等离子体高压电源的特殊要求,将SPWM脉宽调制技术用于该电源控制中,具有原理简单、控制和调节性能好,可消除谐波,调节和稳定输出电压等诸多特点。本文分析了等离子体高压电源中需解决的关键问题;提出了有效的解决方法。在此基础上,成功研制了一台多路输出电压可调、频率连续可调的等离子体高压电源。样机实验证明了分析和设计的正确性。In the view of the special specification of the plasma high-voltage power supply,the Sine Pulse Width Modulation （SPWM） was applied to realize the power supply control,which makes the power supply having the characters of simple princple, good control and regulation performances, and being capable to eliminate the harmonic, to regulate and stabilize the output voltage etc.The paper analyzes the key problems of the plasma high-voltage power supply,which are needed to be solved, and proposes the effective measures.Then a plasma high-voltage power supply prototype is developed which possesses the performances of multi-output voltage and frequency adjustable,and the validity of the scheme is demonstrated by the experiment.

关 键 词：电源 等离子体 逆变器 

分 类 号：TN86[电子电信—信息与通信工程]