纳米金属氧化物气敏薄膜的最佳晶粒尺寸和介观效应  

The Optimun Grain Size of Nano Metal Oxide Gas Sensing Thin-Film and Mesoscopic Effect

作　　者：李蕾[1] 刘文利[1] 高建华[1] 裘南畹[1] 

机构地区：[1]山东大学物理和微电子学院,山东济南250061

出　　处：《计测技术》2006年第B09期12-15,共4页Metrology & Measurement Technology

摘　　要：纳米金属氧化物气敏薄膜存在灵敏度的最佳膜厚l*和最佳晶粒尺寸r0*,其值与材料和工艺有关。最佳晶粒尺寸的存在是一种新的介观效应,它来自晶粒尺寸缩小到一定程度时反映吸附氧负离子的Fermi统计失效;根据当晶粒尺寸缩小到特征长度rm时晶粒将保持电中性的Kubo理论对Fermi统计公式进行修正,从而给出了最佳晶粒尺寸r0*=2rm的结果,并用Kubo理论电子逸出功公式估算了rm与r0*的数值。The optimum film thickness l° and optimum grain size ro° for sensitivity in nano metal oxide gas sensing thin film are existent, and the value is dependent on the material and technics. The existenceof optimum grain size is a new kind of mesoscopic effect, which is from the disability of Fermi statistics for negative oxide ions when the grain size reduced to a certain extent, according to the modification of Kubo theory for the grains keeping neuter to fermi statistics when the grain size reduced tocharacter length rm, we get that ro° =2rm, and the values of ro° and optimum grain size ro° are estimated with the word function in Kubo theory.

关 键 词：晶粒尺寸 介观效应 Fermi统计 

分 类 号：O484.4[理学—固体物理] TB383[理学—物理]