硒化锌基底7．8～10．6μm波段增透膜  

Deposition of 7.8 - 10.6μm Antireflection Coating on ZnSe Substrate

作　　者：林炳[1] 孙剑[1] 张阔[1] 王春[1] 武淑明[1] 朱震[1] 

机构地区：[1]华北光电技术研究所,北京100015

出　　处：《激光与红外》2006年第B09期814-816,共3页Laser & Infrared

摘　　要：文中介绍了研制的7．8～10．6μm的长波红外增透膜，平均透射率大于98％。通过材料选择，合理的膜系设计，离子辅助技术和温度筛选等多种改进工艺，研制出可靠性和光谱特性皆优的ZnSe长波红外增透膜，达到了GJB2485-95光学薄膜通用规范要求。In the paper,AR coating is introduced and T is above 98% at 7.8 - 10.6μm wavelength. In order to resolve physical durability, several advantage techniques are being improved, such as choosing of materials, reasonable film design,ion aid deposition parameter adjustment and feasible temperature. Finally, AR coating on ZnSe Substrate with super machines stability and high transmittance efficiency is advanced, which can pass environment test of GJB2485 - 95.

关 键 词：光学薄膜 红外增透膜 硒化锌(ZnSe) 膜层物理性能 

分 类 号：O484[理学—固体物理]