三表面干涉条纹空域傅里叶分析  

Spatial Fourier Fringe Analysis with Single Three-Surface Interferogram

作　　者：徐建程[1] 石琦凯[1] 柴立群[1] 邓燕[1] 许乔[1] 

机构地区：[1]成都精密光学工程研究中心,四川成都610041

出　　处：《中国激光》2006年第9期1260-1264,共5页Chinese Journal of Lasers

基　　金：中国工程物理研究院人才基金(zx0104)资助项目

摘　　要：为了准确测量透射平行平板,提出了单幅三表面干涉条纹空域傅里叶分析法,根据三表面干涉条纹频谱的旁瓣位置及峰值不同,分别提取平板前、后表面的面形及厚度变化等信息。通过与相移法(PSI)对比实验发现,该方法测量准确且重复性高。分析了两种方法各自的主要误差并量化:相移法中平板后表面反射光对前表面测量的影响;傅里叶分析法中的边界效应,离轴像差和平板材料均匀性引入的测量误差。To accurately measure transparent elements with parallel surfaces, a new simple and useful method using spatial Fourier analysis technique with single three-surface interferogram is presented. It can obtain the interferometric phase from three-surface inteferogram by extracting the corresponding spectra. Therefore, the profiles of both surface and variation in thickness are calculated simultaneously. By comparing the spatial Fourier fringe analysis with phase-shifting interferometry （PSI）, it can be found that the measured results are almost the same. The main errors which cause the measurement difference for the two method are given and analyzed, such as reflection from back surface, boundary problem, off-axial aberrations and homogeneity of the plate.

关 键 词：测量 干涉测量 傅里叶分析 多表面干涉条纹 平行平板 

分 类 号：O436.1[机械工程—光学工程]