相移干涉仪中探测器非线性误差及其补偿  

Detector Nonlinear Error and Compensation in Phase-Stepping Interferometry

作　　者：曾丹华[1] 肖体乔[1] 席再军[1] 杜国浩[1] 刘丽想[1] 骆玉宇[1] 徐洪杰[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《光学学报》2006年第9期1358-1362,共5页Acta Optica Sinica

摘　　要：通过对多个相移算法的理论分析和数值模拟,发现探测器的非线性响应在相位中会引入2倍空间频率的系统误差。结果表明,非标准相移算法随着探测器非线性度的增加,相对误差也越来越大。提出了压电陶瓷驱动器的移相误差和光电探测器的非线性误差相互抵消的误差补偿技术,并给出了判别误差匹配有效性的实用判据。仿真表明,这种误差补偿技术可以使测量误差减小约一个量级。证明了在不考虑波前幅度信息时,标准相移算法对光电探测器的非线性为零响应,不影响仪器精度。Through theoretical analysis and numerical simulation of many phase-stepping algorithms, it is concluded that the detector nonlinearity would introduce systematic error with twice spatial frequencies of the interference pattern into the result phase. Relative error of nonstandard phase-stepping algorithm will increase as the detector nonlinearity increases. An error compensating technique that the phase shift error of PZT and the nonlinear error of the optoelectronic detector counteract with each other is reported, and the practical error-matching criterion is presented. The simulation shows that this technique reduces the measurement error with near one order of magnitude. It is proved that the standard phase-stepping algorithms have perfect zero error response to nonlinear detectors and no effect on the accuracy of the device exists, when the amplitude information of the wavefront is ignored.

关 键 词：光学计量 探测器非线性 相移干涉仪 系统误差补偿 空间频率 

分 类 号：O436.1[机械工程—光学工程]