零补偿干涉检测实现及误差量规律  

Interferometric null testing and the model for separating adjustment errors

作　　者：程灏波[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《哈尔滨工业大学学报》2006年第8期1247-1250,共4页Journal of Harbin Institute of Technology

基　　金：国家高技术研究发展计划资助项目(2001AA4211140);国家自然科学基金资助项目(50175062)

摘　　要：针对大口径离轴光学非球面反射镜的特殊工艺性,在合理设计零补偿器结构形式的基础上,综合考虑零补偿器各组件的误差参量做进一步优化.利用零补偿器实施非球面元件面形干涉检测过程中,着重分析调整误差对检验精度的影响,建立误差标定模型.以一块二次离轴非球面反射镜为实例进行了计算机模拟分析,得到对应不同调整误差的干涉图样,可以为快速地调整补偿器与被检元件之间相互位置提供参考,有助于获得指导加工的真实面形结果.Performing objective and accurate evaluation on the figure errors during polishing is one of the key factors to realize fast, deterministic manufacture for large optical off-axis aspheric mirrors. In consideration of the special processes of aspheric, an applicable null corrector is designed and optimized based on the indexes of each component. Furthermore, based on the interferometric testing system, an analysis on the testing accuracy of the designed null corrector focused on the adjustment errors is made, and errors separating matrix is established. At last, interferometric patterns corresponding to different adjustment errors are achieved by simulation. Simulation results would be helpful to adjust the relative position between the corrector and mirror.

关 键 词：非球面 抛光 干涉检测 零补偿器 优化 

分 类 号：TH706[机械工程—仪器科学与技术]