基于CMOS亚阈值特性的低功耗温度传感器  

Temperature Sensors Based on CMOS Sub-Threshold Characteristic

作　　者：张洵[1] 王鹏[1] 靳东明[1] 

机构地区：[1]清华大学微电子所,北京100084

出　　处：《Journal of Semiconductors》2006年第9期1676-1680,共5页半导体学报（英文版）

摘　　要：针对片上系统测温及其过温保护问题，提出了一种基于CMOS亚阈值特性制造的低功耗温度传感器．CSMC0．6μm数模混合工艺仿真表明，其在-50～150℃的温度范围内，都能良好工作，且因为运放负反馈结构对电源电压具有较高的抑制，在2～6V的范围内都能得到正确的输出结果．芯片实测，温度灵敏度为0．77V／℃．因为基于CMOS亚阈值特性产生了电路的偏置电流，所以工作电流仅16μA．芯片面积300μm×250μm．该传感器的特性表明它非常适用于高容量的集成微系统中．在计算机、汽车电子、生物医学等领域有着广阔的应用前景．The design of a compatible wide-range low-power smart temperature sensor based on the CMOS sub-threshold characteristic is presented for the purpose of on-chip temperature measure and protection from overheating. Simulated with CSMC 0.6μm mixed-signal CMOS technology,the circuit works well over the temperature range from - 50 to 150℃. For the amplifier feedback,it has a high power supply rejection ratio under VDD from 2 to 6V. Measurements support the simulation result. The temperature sensitivity is 0.77V/℃. The power dissipation of the sensor is 16μA because the bias current is generated by the CMOS sub-threshold characteristic. The chip area is 300μm × 250μm. The characteristics of this sensor make it especially suitable for low-cost high-volume integrated microsystems over a wide range of fields,such as computer, automotive, and biomedical.

关 键 词：温度传感器 温度保护电路 电源电压抑止比 温度灵敏度 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]