Preparation and Characterization of Hybrid ZnO/Ormosils Films  

作　　者：王宝玲 胡丽丽 张丽艳 赵士龙 

机构地区：[1]College of Information Engineering, China Jiliang University, Hangzhou 310018 [2]Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

出　　处：《Chinese Physics Letters》2006年第10期2799-2802,共4页中国物理快报（英文版）

摘　　要：Hybrid ZnO/ormosils films are prepared by the sol-gel method. A FT-IR spectrometer, 900 UV/VIS/NIR spectrophotometer, atomic force microscope, and ellipsometer are employed to investigate microstructure and optical properties of the films fired at different temperatures. The results show that the films with high transmittance and low surface roughness could be obtained at the heat-treatment temperature of 150℃, the refractive index and thickness of the film are 1.413, 2.11μm, respectively. Higher temperatures （350℃, 550℃） change the film microstructure severely, and then decrease the transmittance of the films,Hybrid ZnO/ormosils films are prepared by the sol-gel method. A FT-IR spectrometer, 900 UV/VIS/NIR spectrophotometer, atomic force microscope, and ellipsometer are employed to investigate microstructure and optical properties of the films fired at different temperatures. The results show that the films with high transmittance and low surface roughness could be obtained at the heat-treatment temperature of 150℃, the refractive index and thickness of the film are 1.413, 2.11μm, respectively. Higher temperatures （350℃, 550℃） change the film microstructure severely, and then decrease the transmittance of the films,

关 键 词：PLANAR WAVE-GUIDE SOL-GEL PROCESS OPTICAL-PROPERTIES THIN-FILMS SURFACE-PROPERTIES ORMOSIL FILMS 

分 类 号：O484[理学—固体物理]