表面微机械加速度计原理及机械故障诊断应用  

The Principle of Surface Micromachine Accelerometer and Its Application in Mechanical Fault Diaonosis

作　　者：荆涛[1] 范蟠果[1] 

机构地区：[1]西北工业大学自动化学院,陕西西安710072

出　　处：《电气自动化》2006年第5期63-64,71,共3页Electrical Automation

摘　　要：介绍了表面微机械加速度计的工作原理、性能指标及应用特性。在机械故障诊断应用实例中,提供了正常和故障状态的时域波形。通过波形比较和频域仿真分析,展示了该加速度计作为振动测量手段的重要性。This paper introduces the principle of surface micromachine accelerometer, as well as its characters and parameters. An application example of SMA in the mechanical fault diagnoses system with its waveform in time-domain was given. By comparing the waveform and analyzing the spectrum of the waveform in frequency domain, the importance of the application of SMA in vibration detection systems is showed.

关 键 词：表面微机械加速度计 g-CELL ASIC 故障诊断 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]