表面波型微波感耦常压氖等离子体的激发温度研究  

THE STUDY OF EXCITATION TEMPERATURE OF Ne-MIP SUSTAINED BY A SURFATRON IN ATMOSPHERIC PRESSURE

作　　者：普小云[1] 杨灿珠[1] 付宏郎 

机构地区：[1]云南大学物理系

出　　处：《光谱学与光谱分析》1996年第6期46-50,共5页Spectroscopy and Spectral Analysis

摘　　要：用光学多道分析仪研究表面波型常压微波感耦氖等离子体（Ｎｅ－ＭＩＰ）。采用“多线法”测定了Ｎｅ－ＭＩＰ的激发温度；研究了实验参数对激发温度的影响；讨论了该等离子体的激发生成机制；推算了亚稳态原子浓度随实验参数的变化情况。In this paper,the Neon Microwave-induced Plasma (Ne-MIP)Sustained by a surfatron has been studied with Maxwell's method using an OMA equipment.The Ne-MIP was obtained in atmosphere pressure; the influence of experimental parameters on Excitation Temperature,such as, microwave power, flux of Neon gas and view possition has been considered;the excitation mechanism of this kind of plasma has been discussed; according to this mechanism, the atomic conentraion of Neon metastable under different experimental conditions has been calculated.

关 键 词：激发温度 激发机制 氖亚稳态 氖等离子体 

分 类 号：O531[理学—等离子体物理]